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Metalorganic chemical vapor deposition using a single solution source for high Jc Y1Ba2Cu3O7−x superconducting films

✍ Scribed by Matsuno, S.; Uchikawa, F.; Utsunomiya, S.; Nakabayashi, S.


Book ID
124066302
Publisher
American Institute of Physics
Year
1992
Tongue
English
Weight
484 KB
Volume
60
Category
Article
ISSN
0003-6951

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In-situ growth of Y1Ba2Cu3O7−x thin film
✍ Aiguo Feng; Li Luo; J. Martin; C.J. Maggiore 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 565 KB

A temperature-controlled chemical vapor deposition (TC-CVD) process was developed for in-situ growth of highly c-axis orientated YtBa2Cu30~+x (YBCO) thin films directly on sapphire substrates. This new CVD process, for the first time, uses programmable temperature controllers to optimize and tailor