✦ LIBER ✦

Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system

✍ Scribed by L. Gao; P. Härter; Ch. Linsmeier; J. Gstöttner; R. Emling; D. Schmitt-Landsiedel

No coin nor oath required. For personal study only.

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