Direct liquid injection metal organic chemical vapor deposition of Nd2O3 thin films using Tris(2,2,6,6-tetramethyl-3,5-heptanedionato) neodymium

✍ Scribed by Moon-Kyun Song; Shi-Woo Rhee

• Book ID: 108287901
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 268 KB
• Volume: 492
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2005.06.027