Liquid-Delivery Metal–Organic CVD of Strontium Bismuth Tantalate Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 and Bi(C6H5)3 Precursors

✍ Scribed by W.-C. Shin; K.-J. Choi; N.-J. Seong; E.-S. Choi; B.-H. Kim; S.-G. Yoon

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 317 KB
• Volume: 8
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(20020903)8:5<221::aid-cvde221>3.0.co;2-c