Metalorganic chemical vapor deposition of aluminum oxide on Si: Evidence of interface SiO[sub 2] formation

✍ Scribed by Roy Chowdhuri, A.; Takoudis, C. G.; Klie, R. F.; Browning, N. D.

• Book ID: 121700414
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 296 KB
• Volume: 80
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1483903