Metallo-organic decomposition technology for PZT films in memory applications

✍ Scribed by W. Zhu; R.W. Vest

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 511 KB
• Volume: 29
• Category: Article
• ISSN: 0924-0136
• DOI: 10.1016/0924-0136(92)90450-7