Characteristics of ferroelectric 60/40 PZT films deposited by metallo-organic decomposition technology for memory applications

✍ Scribed by W. Zhu; R. W. Vest; M. S. Tse; M. K. Rao; Z. Q. Liu

• Publisher: Springer US
• Year: 1994
• Tongue: English
• Weight: 648 KB
• Volume: 5
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1007/bf01198950