𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Metal Oxide Thin Films Deposited from Metal Organic Precursors in Supercritical CO 2 Solutions

✍ Scribed by Gougousi, Theodosia; Barua, Dipak; Young, Erin D.; Parsons, Gregory N.


Book ID
126253370
Publisher
American Chemical Society
Year
2005
Tongue
English
Weight
371 KB
Volume
17
Category
Article
ISSN
0897-4756

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Approach to control deposition of ultra
✍ Igor K. Igumenov; Pyotr P. Semyannikov; Sergei V. Trubin; Natalia B. Morozova; N πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 775 KB

Atomic layer deposition (ALD) processes have attracted attention during the past decade as a method allowing one to obtain high-quality thin films of various materials including metal oxides, metal nitrides and pure metals. Here we investigated a novel pulse method for the deposition of ultra thin f