Catalytic metal gate-silicon dioxide-silicon carbide (MOSiC) capacitors operating to about 800 "C are used as high temperature gas sensor devices. Hydrogen or hydrogen containing molecules, which are dissociated on the catalytic metal surface, create a decrease of the flat band voltage of the MOS ca
β¦ LIBER β¦
Metal oxide gas sensor for high temperature application
β Scribed by T. Gessner; K. Gottfried; R. Hoffmann; C. Kaufmann; U. Weiss; E. Charetdinov; P. Hauptmann; R. Lucklum; B. Zimmermann; U. Dietel; G. Springer; M. Vogel
- Publisher
- Springer-Verlag
- Year
- 2000
- Tongue
- English
- Weight
- 163 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0946-7076
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