Metal-organic chemical vapor deposition of high-k dielectric Ce–Al–O layers from various metal-organic precursors for metal–insulator–metal capacitor applications

✍ Scribed by Abrutis, A.; Lukosius, M.; Skapas, M.; Stanionyte, S.; Kubilius, V.; Wenger, Ch.; Zauner, A.

• Book ID: 123056981
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 990 KB
• Volume: 536
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.03.045