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Metal ion beams from an ECR ion source using volatile compounds

✍ Scribed by H. Koivisto; J. Ärje; M. Nurmia

Book ID: 113285426
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 725 KB
Volume: 94
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)95368-6

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