✦ LIBER ✦
Volatile products and endpoint detection in reactive ion etching of III–V compounds with a broad beam ECR source
✍ Scribed by D.L. Melville; J. Budinavicius; D.A. Thompson; J.G. Simmons
- Book ID
- 113286815
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 420 KB
- Volume
- 106
- Category
- Article
- ISSN
- 0168-583X
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