Active oxygen generator by silent discha
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Masaaki Tanaka; Yasuyuki Kawagoe; Hisashi Tsukazaki; Kenichiro Yamanishi
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Article
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2008
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John Wiley and Sons
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English
β 898 KB
## Abstract The authors have studied the lowβpressure silentβdischargeβtype active oxygen generator in terms of its application to the formation of oxide thin films. In this paper the oxidation power of active oxygen in the formation of oxide thin films is compared with that of oxygen and ozone by