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MEMS integrated submount alignment for optoelectronics

✍ Scribed by Shakespeare, W.J.; Pearson, R.A.; Grenestedt, J.L.; Hutapea, P.; Gupta, V.

Book ID: 115371263
Publisher: Optical Society of America
Year: 2005
Tongue: English
Weight: 1003 KB
Volume: 23
Category: Article
ISSN: 0733-8724
DOI: 10.1109/JLT.2004.841269

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