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MEMS inclinometer based on a novel piezoresistor structure

✍ Scribed by Lijun Tang; Kairui Zhang; Shang Chen; Guojun Zhang; Guowen Liu

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 936 KB
Volume: 40
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2008.06.080

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