Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion

✍ Scribed by Parisa Ture Savadkoohi; Sabrina Colpo; Benno Margesin

• Publisher: Springer-Verlag
• Year: 2009
• Tongue: English
• Weight: 541 KB
• Volume: 16
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-009-0946-7