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MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter

✍ Scribed by Yi Chiu; Chiung-Ting Kuo; Yu-Shan Chu

Book ID: 106185246
Publisher: Springer-Verlag
Year: 2007
Tongue: English
Weight: 470 KB
Volume: 13
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0348-z

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