✦ LIBER ✦
The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting
✍ Scribed by Shen, Dongna; Park, Jung-Hyun; Ajitsaria, Jyoti; Choe, Song-Yul; Wikle, Howard C; Kim, Dong-Joo
- Book ID
- 120733483
- Publisher
- Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 662 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0960-1317
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