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MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature

โœ Scribed by Pant, B.; Choi, S.; Baumert, E. K.; Allen, B. L.; Graham, S.; Gall, K.; Pierron, O. N.


Book ID
113082038
Publisher
Sage Publications
Year
2011
Tongue
English
Weight
836 KB
Volume
52
Category
Article
ISSN
0014-4851

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