✦ LIBER ✦
Nanomechanical and nanotribological testing of ultra-thin carbon-based and MoST films for increased MEMS durability
✍ Scribed by Beake, B D; Goodes, S R; Shi, B
- Book ID
- 121434490
- Publisher
- Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 948 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0022-3727
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