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MEMS: A Practical Guide to Design, Analysis, and Applications

✍ Scribed by Oliver Paul (auth.), Jan G. Korvink, Oliver Paul (eds.)


Publisher
Springer-Verlag Berlin Heidelberg
Year
2006
Tongue
English
Leaves
979
Edition
1
Category
Library

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✦ Synopsis


MEMS are rapidly moving from the research laboratory to the marΒ­ ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group exploring this promising technology, including such giants as INTEL and Motorola. Yet MEMS are fundamentally different from microelectronics. This means that companies with an established track record in these branches need to adapt their skills, whereas companies that want to enter the "miniaturization" market need to establish an entirely new set of capabilΒ­ ities. The same can be said of engineers with classical training, who will also need to be educated toward their future professional activity in the MEMS field. Here are some questions that a company or technologist may ask: I have an existing product with miniaturization market potenΒ­ tial. Which technology should I adopt? What are the manufacturing options available for miniaturizaΒ­ tion? What are the qualitative differences? How do we maintainamarketleadforproductsbased onMEMS? Is there CAD support?Can we outsource manufacturing? Which skills in our current capability need only adaptation? What skills need to be added? Professors Jan Korvink and Oliver Paul have set out to answer these questions in a form that addresses the needs of companies, commercial practitioners, and technologists.

✦ Table of Contents


Front Matter....Pages i-xxv
Microtransducer Operation....Pages 1-51
Material Properties: Measurement and Data....Pages 53-92
MEMS and NEMS Simulation....Pages 93-186
System-Level Simulation of Microsystems....Pages 187-227
Thermal-Based Microsensors....Pages 229-279
Photon Detectors....Pages 281-343
Free-Space Optical MEMS....Pages 345-402
Integrated Micro-Optics....Pages 403-452
Microsensors for Magnetic Fields....Pages 453-521
Mechanical Microsensors....Pages 523-566
Semiconductor-Based Chemical Microsensors....Pages 567-666
Microfluidics....Pages 667-727
Biomedical Systems....Pages 729-749
Microactuators....Pages 751-803
Micromachining Technology....Pages 805-851
LIGA Technology for R&D and Industrial Applications....Pages 853-899
17 Interface Circuitry and Microsystems....Pages 901-942
Back Matter....Pages 943-965

✦ Subjects


Electronics and Microelectronics, Instrumentation; Optical and Electronic Materials; Nanotechnology; Microwaves, RF and Optical Engineering


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