MEMS: A Practical Guide to Design, Analysis, and Applications

✍ Scribed by Jan Korvink, Oliver Haber

• Year: 2005
• Tongue: English
• Leaves: 992
• Category: Library

✦ Synopsis

Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ôsmaller, better, cheaper, and faster'ö If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.

✦ Table of Contents

MEMS: A Practical Guide to Design, Analysis, and Applications......Page 2
Contents......Page 6
Foreword......Page 18
Preface......Page 20
1 Microtransducer Operation......Page 28
2 Material Properties: Measurement and Data......Page 80
3 MEMS and NEMS Simulation......Page 120
4 System-Level Simulation of Microsystems......Page 214
5 Thermal-Based Microsensors......Page 256
6 Photon Detectors......Page 308
7 Free-Space Optical MEMS......Page 372
8 Integrated Micro-Optics......Page 430
9 Microsensors for Magnetic Fields......Page 480
10 Mechanical Microsensors......Page 550
11 Semiconductor-Based Chemical Microsensors......Page 594
12 Microfluidics......Page 694
13 Biomedical Systems......Page 756
14 Microactuators......Page 778
15 Micromachining Technology......Page 832
16 LIGA Technology for R&D and Industrial Applications......Page 880
17 Interface Circuitry and Microsystems......Page 928
Contributors......Page 970
Index......Page 972

✦ Subjects

Приборостроение;Микро- и наносистемная техника;