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Meeting the pattern definition challenge of 256MBit DRAM x-ray masks

✍ Scribed by B Koek; R Grant; L Haas; B Jennings; B Wallman

No coin nor oath required. For personal study only.

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State of the art of pattern placement ac

✍ S. Pongratz; U. Mescheder; Ch. Ehrlich; H.-L. Huber; K. Kohlmann; W. Windbracke 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 573 KB