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Mechanochemical Polishing of Silicon Nitride

✍ Scribed by H. Vora; T. W. Orent; R. I Stokes

Book ID: 110820372
Publisher: John Wiley and Sons
Year: 1982
Tongue: English
Weight: 458 KB
Volume: 65
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.1982.tb10517.x

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