Mechanistics of early stage growth of aluminum nitride (AlN) on alumina: TMAl [trimethylaluminum] and ammonia

✍ Scribed by Bertolet, D. C.; Rogers, J. W.

• Book ID: 121187173
• Publisher: American Chemical Society
• Year: 1993
• Tongue: English
• Weight: 649 KB
• Volume: 5
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm00027a025