Growth of Aluminum Nitride on Porous Alumina and Silica through Separate Saturated Gas−Solid Reactions of Trimethylaluminum and Ammonia

✍ Scribed by Puurunen, Riikka L.; Root, Andrew; Sarv, Priit; Viitanen, Minna M.; Brongersma, Hidde H.; Lindblad, Marina; Krause, A. Outi I.

• Book ID: 121260871
• Publisher: American Chemical Society
• Year: 2002
• Tongue: English
• Weight: 136 KB
• Volume: 14
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm011176i