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Mechanisms of stress generation within a polysilicon gate for nMOSFET performance enhancement

โœ Scribed by Pierre Morin; Claude Ortolland; Eric Mastromatteo; Catherine Chaton; Franck Arnaud

Book ID
103843633
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
312 KB
Volume
135
Category
Article
ISSN
0921-5107

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