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Mechanisms of cluster implantation in silicon: A molecular-dynamics study

✍ Scribed by Ihara, Sigeo; Itoh, Satoshi; Kitakami, Jun’ichi

Book ID
124169109
Publisher
The American Physical Society
Year
1998
Tongue
English
Weight
402 KB
Volume
58
Category
Article
ISSN
1098-0121

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