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Mechanisms for microstructure evolution in electroplated copper thin films near room temperature

โœ Scribed by Harper, J. M. E.; Cabral, C.; Andricacos, P. C.; Gignac, L.; Noyan, I. C.; Rodbell, K. P.; Hu, C. K.


Book ID
120413632
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
595 KB
Volume
86
Category
Article
ISSN
0021-8979

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