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Mechanism of surface modification in the plasma-surface interaction in electrical arcs

โœ Scribed by Timko, H.; Djurabekova, F.; Nordlund, K.; Costelle, L.; Matyash, K.; Schneider, R.; Toerklep, A.; Arnau-Izquierdo, G.; Descoeudres, A.; Calatroni, S.; Taborelli, M.; Wuensch, W.

Book ID
120229832
Publisher
The American Physical Society
Year
2010
Tongue
English
Weight
918 KB
Volume
81
Category
Article
ISSN
1098-0121

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Optical emission diagnostics in cascade
Optical emission diagnostics in cascade arc plasma polymerization and surface modification processes
โœ Q. S. Yu; E. Krentsel; H. K. Yasuda ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 212 KB ๐Ÿ‘ 2 views

Optical Emission Spectroscopy (OES) was used to identify reactive species and their excitation states in low-temperature cascade arc plasmas of N 2 , CF 4 , C 2 F 4 , CH 4 , and CH 3 OH. In a cascade arc plasma, the plasma gas (argon or helium) was excited in the cascade arc generator and injected i