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Mechanism of sputtering of solid surfaces by ion-impact

✍ Scribed by POLLITT, K. R.; ROBB, J. C.; THOMAS, D. W.

Book ID: 109709052
Publisher: Nature Publishing Group
Year: 1978
Tongue: English
Weight: 209 KB
Volume: 272
Category: Article
ISSN: 0028-0836
DOI: 10.1038/272436a0

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