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Mechanism of Pyridine-Catalyzed SiO2 Atomic Layer Deposition Studied by Fourier Transform Infrared Spectroscopy

✍ Scribed by Du, Y.; Du, X.; George, S.M.

Book ID: 120293597
Publisher: American Chemical Society
Year: 2007
Tongue: English
Weight: 388 KB
Volume: 111
Category: Article
ISSN: 1932-7447
DOI: 10.1021/jp0638484

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