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Mechanism of oxide deformation during silicon thermal oxidation

✍ Scribed by H. Kageshima; M. Uematsu; K. Akagi; S. Tsuneyuki; T. Akiyama; K. Shiraishi

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
127 KB
Volume
376-377
Category
Article
ISSN
0921-4526

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