Mechanism for convex corner undercutting of (110) silicon in KOH

✍ Scribed by Wei Dong; Xindong Zhang; Caixia Liu; Ming Li; Baokun Xu; Weiyou Chen

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 94 KB
• Volume: 35
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2004.01.005