Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (1 1 0) silicon

✍ Scribed by Cuiping Jia; Wei Dong; Caixia Liu; Xindong Zhang; Jingran Zhou; Zhicheng Zhong; Hailin Xue; Huidong Zang; Baokun Xu; Weiyou Chen

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 256 KB
• Volume: 37
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2006.07.008