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Mechanism analysis of ultrasonic treatment on SU-8 swelling in UV-LIGA technology

✍ Scribed by Liqun Du; Yaping Liu; Chengbin Li

Book ID: 114461726
Publisher: The Institution of Engineering and Technology
Year: 2011
Tongue: English
Weight: 217 KB
Volume: 6
Category: Article
ISSN: 1750-0443
DOI: 10.1049/mnl.2011.0515

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