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Mechanical Stress and Defect Formation in Device-Processing: Validity of the Numerical Models for Mechanical Stress Calculation

✍ Scribed by Polignano, M.L.; Carnevale, G.P.; Mica, I.; Pastore, C.


Book ID
114618664
Publisher
IEEE
Year
2007
Tongue
English
Weight
465 KB
Volume
54
Category
Article
ISSN
0018-9383

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