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Mechanical properties of thin film–substrate systems

✍ Scribed by Š Šimůnková; O Bláhová; I Štěpánek


Book ID
108469180
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
393 KB
Volume
133
Category
Article
ISSN
0924-0136

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We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a