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Mechanical properties of TaN-Cu nanocomposite thin films

✍ Scribed by J.H. Hsieh; P.C. Liu; C. Li; M.K. Cheng; S.Y. Chang


Book ID
108278469
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
900 KB
Volume
202
Category
Article
ISSN
0257-8972

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