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Antibacterial properties of TaN–(Ag,Cu) nanocomposite thin films

✍ Scribed by Hsieh, J.H.; Yeh, T.H.; Li, C.; Chiu, C.H.; Huang, C.T.

Book ID
123353350
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
602 KB
Volume
87
Category
Article
ISSN
0042-207X

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✍ J.H. Hsieh; C.C. Chang; C. Li; S.J. Liu; Y.K. Chang 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 1017 KB

TaON-Ag nanocomposite thin films with Ag nano-particles emerged on TaON surface were prepared by reactive co-sputtering of Ta and Ag in the plasma of O 2 , N 2 , and Ar. The deposition temperature was 300 °C. The Ag contents were 2.4, 5.0, 10.6 at.% respectively. After deposition, some samples were