Mechanical Properties Measurement of PECVD Silicon Nitride after Rapid Thermal Annealing Using Nanoindentation Technique

✍ Scribed by H.-Y. Yan; K.-S. Ou; K.-S. Chen

• Book ID: 111200819
• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 323 KB
• Volume: 44
• Category: Article
• ISSN: 0039-2103
• DOI: 10.1111/j.1475-1305.2007.00394.x