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Mechanical properties and performance of magnetron-sputtered graded diamond-like carbon films with and without metal additions

✍ Scribed by Bauer, C.; Leiste, H.; Stüber, M.; Ulrich, S.; Holleck, H.

Book ID
120423908
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
266 KB
Volume
11
Category
Article
ISSN
0925-9635

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Constitution, microstructure, mechanical properties, and performance of magnetron-sputtered carbon films with additions of silicon
✍ C. Bauer; H. Leiste; M. Stüber; S. Ulrich; H. Holleck 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 434 KB

## Abstract Amorphous carbon films with additions of silicon were deposited by non‐reactive magnetron sputtering on WC‐Co hard metal and on silicon substrates. The targets were hot‐pressed, homogenous mixtures of graphite and silicon carbide powder. Additional argon ion bombardment of the growing f