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Mechanical measurements of ultra-thin amorphous carbon membranes using scanning atomic force microscopy

✍ Scribed by Ji Won Suk; Shanthi Murali; Jinho An; Rodney S. Ruoff


Book ID
113514518
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
631 KB
Volume
50
Category
Article
ISSN
0008-6223

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## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t