Mechanical measurement of the residual stress in thin PVD films
โ Scribed by R.O.E. Vijgen; J.H. Dautzenberg
- Book ID
- 107864773
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 611 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
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