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Mechanical and tribological characterization of a thermally actuated MEMS cantilever

✍ Scribed by Marius Pustan; Véronique Rochus; Jean-Claude Golinval

Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
633 KB
Volume
18
Category
Article
ISSN
0946-7076

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The design, modeling, and optimization of a novel, thermally actuated CMOS-MEMS switch are presented in this article. This series capacitive MEMS switch solves the substrate loss and down-state capacitance degradation problems commonly plaguing MEMS switches. The switch uses finger structure for cap