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Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects

✍ Scribed by Chiodarelli, Nicolo’; Masahito, Sugiura; Kashiwagi, Yusaku; Li, Yunlong; Arstila, Kai; Richard, Olivier; Cott, Daire J; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe M

Book ID: 121505796
Publisher: Institute of Physics
Year: 2011
Tongue: English
Weight: 335 KB
Volume: 22
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/22/8/085302

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