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Measurements of electron temperature, and ion density, in a mixture of O 2 and Ar plasma

✍ Scribed by Reyes, P G; Mendez, E; Osorio-González, D; Castillo, F; Martínez, H

Book ID: 121460620
Publisher: Institute of Physics
Year: 2010
Tongue: English
Weight: 385 KB
Volume: 207
Category: Article
ISSN: 1742-6588
DOI: 10.1088/1742-6596/207/1/012020

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