✦ LIBER ✦

Measurements and modeling of ion energy distributions in high-density, radio-frequency biased CF[sub 4] discharges

✍ Scribed by Sobolewski, Mark A.; Wang, Yicheng; Goyette, Amanda

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ O’Connell, D.; Zorat, R.; Ellingboe, A. R.; Turner, M. M. 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 700 KB

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✍ Edelberg, Erik A.; Aydil, Eray S. 📂 Article 📅 1999 🏛 American Institute of Physics 🌐 English ⚖ 553 KB

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