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Measurement system for full three-dimensional motion characterization of MEMS

✍ Scribed by Rembe, C.; Muller, R.S.

Book ID: 121717023
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 384 KB
Volume: 11
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2002.803285

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