A Laser Doppler Interferometric System f
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G.X. Zhang; Y. Zhong; X. Hong; C.L. Leng; C.Z. Jiang; Z.H. Du; J.F. Ouyang
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Article
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2005
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International Academy for Production Engineering
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English
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Micro-Electro-Mechanical Systems have been growing rapidly over recent years. However, measurement of their motions is a difficult problem. A laser Doppler interferometric system for measuring motion characteristics of vibrating combs in MEMS is presented. The working principle and optical diagram o